Luciana Meli : rechercher sur Z-Library

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1

Development of TiO 2 containing hardmasks through plasma-enhanced atomic layer deposition

De Silva, Anuja, Seshadri, Indira, Chung, Kisup, Arceo, Abraham, Meli, Luciana, Mendoza, Brock, Sulehria, Yasir, Yao, Yiping, Sunder, Madhana, Truong, Hoa, Matham, Shravan, Bao, Ruqiang, Wu, Heng, Fel

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2017

Langue:

english

Fichier:

PDF, 2.52 MB

english, 2017

2

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Extreme Ultraviolet (EUV) Lithography VII - EUV mask and wafer defectivity: strategy and evaluation for full die defect inspection

Panning, Eric M., Goldberg, Kenneth A., Bonam, Ravi K., Tien, Hungyu, Chou, Acer, Meli, Luciana, Halle, Scott D., Wu, Ivy, Huang, Xiaoxia, Lei, Chris, Kuan, Chiyan, Wang, Fei, Corliss, Daniel A., Fang

Année:

2016

Langue:

english

Fichier:

PDF, 926 KB

english, 2016

3

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Extreme Ultraviolet (EUV) Lithography VII - EUV patterning successes and frontiers

Panning, Eric M., Goldberg, Kenneth A., Felix, Nelson, Corliss, Dan, Petrillo, Karen, Saulnier, Nicole, Xu, Yongan, Meli, Luciana, Tang, Hao, De Silva, Anuja, Hamieh, Bassem, Burkhardt, Martin, Mignot

Année:

2016

Langue:

english

Fichier:

PDF, 4.93 MB

english, 2016

4

Detection of Printable EUV Mask Absorber Defects and Defect Adders by Full Chip Optical Inspection of EUV Patterned Wafers

Meli, Luciana, Bonam, Ravi, Halle, Scott, Felix, Nelson

Journal:

IEEE Transactions on Semiconductor Manufacturing

Année:

2017

Langue:

english

Fichier:

PDF, 1.35 MB

english, 2017

5

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 21 February 2016)] Alternative Lithographic Technologies VIII - DSA via hole shrink for advanced node applications

Bencher, Christopher, Cheng, Joy Y., Chi, Cheng, Liu, Chi-Chun, Meli, Luciana, Schmidt, Kristin, Xu, Yongan, de Silva, Ekmini Anuja, Sanchez, Martha I., Farrell, Richard A., Cottle, Hongyun, Kawamura,

Année:

2016

Langue:

english

Fichier:

PDF, 780 KB

english, 2016

6

Influence of a three-dimensional, microarray environment on human Cell culture in drug screening systems

Luciana Meli, Eric T. Jordan, Douglas S. Clark, Robert J. Linhardt, Jonathan S. Dordick

Journal:

Année:

2012

Langue:

english

Fichier:

PDF, 1.14 MB

english, 2012

7

[IEEE 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2016.5.16-2016.5.19)] 2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Detection of printable EUV mask absorber defects and defect adders by full chip optical inspection of EUV patterned wafers

Meli, Luciana, Halle, Scott D., Bonam, Ravi, Felix, Nelson, Vemareddy, Kaushik

Année:

2016

Langue:

english

Fichier:

PDF, 881 KB

english, 2016

8

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Extreme Ultraviolet (EUV) Lithography VIII - Ultrathin EUV patterning stack using polymer brush as an adhesion promotion layer

Panning, Eric M., Goldberg, Kenneth A., Seshadri, Indira, De Silva, Anuja, Meli, Luciana, Liu, Chi-Chun, Chi, Cheng, Guo, Jing, Schmidt, Kristin, Truang, Hoa, Arnold, John C., Felix, Nelson, Singh, Lo

Année:

2017

Langue:

english

Fichier:

PDF, 4.21 MB

english, 2017

9

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Extreme Ultraviolet (EUV) Lithography VIII - Single-expose patterning development for EUV lithography

Panning, Eric M., Goldberg, Kenneth A., De Silva, Anuja, Petrillo, Karen, Meli, Luciana, Shearer, Jeffrey C., Beique, Genevieve, Sun, Lei, Seshadri, Indira, Oh, Taehwan, Han, Seulgi, Saulnier, Nicole,

Année:

2017

Langue:

english

Fichier:

PDF, 690 KB

english, 2017

10

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Extreme Ultraviolet (EUV) Lithography VIII - Driving down defect density in composite EUV patterning film stacks

Panning, Eric M., Goldberg, Kenneth A., Meli, Luciana, Petrillo, Karen, De Silva, Anuja, Arnold, John, Felix, Nelson, Johnson, Richard, Murray, Cody, Hubbard, Alex, Durrant, Danielle, Hontake, Koichi,

Année:

2017

Langue:

english

Fichier:

PDF, 542 KB

english, 2017

11

[IEEE 2019 IEEE Albany Nanotechnology Symposium (ANS) - Albany, NY, USA (2019.11.12-2019.11.13)] 2019 IEEE Albany Nanotechnology Symposium (ANS) - Material and process improvements towards sub 36nm pitch EUV single exposure

Petrillo, Karen, Hetzer, Dave, Shimoaoki, Takashi, Hashimoto, Yusaku, Tanaka, Kouichirou, Kawakami, Shinichiro, Murray, Cody, Meli, Luciana, Hubbard, Alex, Sharma, Saumya, De Silva, Anuja, Huli, Lior,

Année:

2019

Langue:

english

Fichier:

PDF, 466 KB

english, 2019

12

Role of M1-polarized tumor-associated macrophages in the prognosis of advanced ovarian cancer patients

MacciÃ², Antonio, Gramignano, Giulia, Cherchi, Maria Cristina, Tanca, Luciana, Melis, Luca, Madeddu, Clelia

Journal:

Scientific Reports

Année:

2020

Fichier:

PDF, 1.27 MB

2020

13

Patterning Material Challenges for Improving EUV Stochastics

Silva, Anuja De, Meli, Luciana, Guo, Jing, Dutta, Ashim, Goldfarb, Dario L., Church, Jennifer, Felix, Nelson M.

Journal:

Journal of Photopolymer Science and Technology

Année:

2019

Fichier:

PDF, 869 KB

2019

14

[IEEE 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2020.8.24-2020.8.26)] 2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Comparing PVD Titanium Nitride Film Properties and their Effect on Beyond 7 nm EUV Patterning

DeVries, Scott, De Silva, Ekmini Anuja, Canaperi, Donald, Simon, Andrew, de la Pena, Abraham Arceo, Wang, Wei, Maniscalco, Joseph, Meli, Luciana, Mendoza, Brock

Année:

2020

Fichier:

PDF, 377 KB

2020

15

Room temperature ionic liquids as emerging solvents for the pretreatment of lignocellulosic biomass

Mauricio Mora-Pale, Luciana Meli, Thomas V. Doherty, Robert J. Linhardt, Jonathan S. Dordick

Journal:

Biotechnology and Bioengineering

Année:

2011

Langue:

english

Fichier:

PDF, 1022 KB

english, 2011

16

Synthesis, Structure and Conformation of Partially-Modified Retro- and Retro-Inverso ψ[NHCH(CF3)]Gly Peptides

Alessandro Volonterio, Stefano Bellosta, Fabio Bravin, Maria Cristina Bellucci, Luca Bruché, Giorgio Colombo, Luciana Malpezzi, Stefania Mazzini, Stefano V. Meille, Massimiliano Meli, Carmen Ramírez d

Journal:

Chemistry - A European Journal

Année:

2003

Langue:

english

Fichier:

PDF, 401 KB

english, 2003

17

ChemInform Abstract: Electrospinning from Room Temperature Ionic Liquids for Biopolymer Fiber Formation.

Luciana Meli, Jianjun Miao, Jonathan S. Dordick, Robert J. Linhardt

Journal:

Année:

2011

Fichier:

PDF, 20 KB

2011

18

Variation in liana abundance and biomass along an elevational gradient in the tropical Atlantic Forest (Brazil)

Luciana F. Alves, Marco A. Assis, Juliano van Melis, Ana L. S. Barros, Simone A. Vieira, Fernando R. Martins, Luiz A. Martinelli, Carlos A. Joly

Journal:

Ecological Research

Année:

2012

Langue:

english

Fichier:

PDF, 472 KB

english, 2012

19

Aggregation and Coarsening of Ligand-Stabilized Gold Nanoparticles in Poly(methyl methacrylate) Thin Films

Meli, Luciana, Green, Peter F.

Journal:

Année:

2008

Langue:

english

Fichier:

PDF, 783 KB

english, 2008

20

Glass Transition of Polymer−Nanocrystal Thin Film Mixtures: Role of Entropically Directed Forces on Nanocrystal Distribution

Arceo, Abraham, Meli, Luciana, Green, Peter F.

Journal:

Année:

2008

Langue:

english

Fichier:

PDF, 264 KB

english, 2008

21

Path-Dependent Morphology and Relaxation Kinetics of Highly Amphiphilic Diblock Copolymer Micelles in Ionic Liquids

Meli, Luciana, Santiago, Jessica M., Lodge, Timothy P.

Journal:

Année:

2010

Langue:

english

Fichier:

PDF, 973 KB

english, 2010

22

Electrospinning from room temperature ionic liquids for biopolymer fiber formation

Meli, Luciana, Miao, Jianjun, Dordick, Jonathan S., Linhardt, Robert J.

Journal:

Green Chemistry

Année:

2010

Langue:

english

Fichier:

PDF, 289 KB

english, 2010

23

Three dimensional cellular microarray platform for human neural stem cell differentiation and toxicology

Meli, Luciana, Barbosa, Hélder S.C., Hickey, Anne Marie, Gasimli, Leyla, Nierode, Gregory, Diogo, Maria Margarida, Linhardt, Robert J., Cabral, Joaquim M.S., Dordick, Jonathan S.

Journal:

Stem Cell Research

Année:

2014

Langue:

english

Fichier:

PDF, 1.58 MB

english, 2014

24

Equilibrium vs Metastability: High-Temperature Annealing of Spherical Block Copolymer Micelles in an Ionic Liquid

Meli, Luciana, Lodge, Timothy P.

Journal:

Année:

2009

Langue:

english

Fichier:

PDF, 689 KB

english, 2009

25

FGF–FGFR Signaling Mediated through Glycosaminoglycans in Microtiter Plate and Cell-Based Microarray Platforms

Sterner, Eric, Meli, Luciana, Kwon, Seok-Joon, Dordick, Jonathan S., Linhardt, Robert J.

Journal:

Année:

2013

Langue:

english

Fichier:

PDF, 1.98 MB

english, 2013

26

Templating of Gold Nanocrystals in Micellar Cores of Block Copolymer Films

Meli, Luciana, Li, Yuan, Lim, Kwon Teak, Johnston, Keith P., Green, Peter F.

Journal:

Année:

2007

Langue:

english

Fichier:

PDF, 750 KB

english, 2007

27

Structural Inversion of Micellar Block Copolymer Thin Films

Li, Yuan, Meli, Luciana, Lim, Kwon T., Johnston, Keith P., Green, Peter F.

Journal:

Année:

2006

Langue:

english

Fichier:

PDF, 1.24 MB

english, 2006

28

Polystyrene thin films in

Meli, Luciana, Pham, Joseph Q., Johnston, Keith P., Green, Peter F.

Journal:

Physical Review E

Année:

2004

Langue:

english

Fichier:

PDF, 363 KB

english, 2004

29

Microarray platform affords improved product analysis in mammalian cell growth studies

Datta, Payel, Meli, Luciana, Li, Lingyun, Migliore, Nicole, Schaefer, Eugene, Sharfstein, Susan T., Dordick, Jonathan S., Linhardt, Robert J.

Journal:

Biotechnology Journal

Année:

2014

Langue:

english

Fichier:

PDF, 860 KB

english, 2014

30

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Extreme Ultraviolet (EUV) Lithography VI - Towards production ready processing with a state-of-the-art EUV cluster

Wood, Obert R., Panning, Eric M., Petrillo, Karen, Saulnier, Nicole, Johnson, Richard, Meli, Luciana, Robinson, Chris, Koay, Chiew-seng, Felix, Nelson, Corliss, Daniel, Colburn, Matthew, Saito, Takash

Année:

2015

Langue:

english

Fichier:

PDF, 582 KB

english, 2015

31

[IEEE 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Saratoga Springs, NY, USA (2015.5.3-2015.5.6)] 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Track process monitoring via laser scattering imaging

Meli, Luciana, Kwong, Ranee, Murray, Cody J., Petrillo, Karen E., Hubbard, Alex R., Dhagat, Parul, Macnish, Shawn, Palamadai, Chandar

Année:

2015

Langue:

english

Fichier:

PDF, 1.63 MB

english, 2015

32

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 22 February 2015)] Extreme Ultraviolet (EUV) Lithography VI - Toward defect guard-banding of EUV exposures by full chip optical wafer inspection of EUV mask defect adders

Wood, Obert R., Panning, Eric M., Halle, Scott D., Meli, Luciana, Delancey, Robert, Vemareddy, Kaushik, Crispo, Gary, Bonam, Ravi, Burkhardt, Martin, Corliss, Daniel

Année:

2015

Langue:

english

Fichier:

PDF, 450 KB

english, 2015

33

Study of alternate hardmasks for extreme ultraviolet patterning

De Silva, Anuja, Seshadri, Indira, Arceo, Abraham, Petrillo, Karen, Meli, Luciana, Mendoza, Brock, Yao, Yiping, Belyansky, Michael, Halle, Scott, Felix, Nelson M.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Année:

2016

Langue:

english

Fichier:

PDF, 1.39 MB

english, 2016

34

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Advances in Patterning Materials and Processes XXXIV - DSA patterning options for logics and memory applications

Hohle, Christoph K., Gronheid, Roel, Liu, Chi-Chun, Franke, Elliott, Mignot, Yann, LeFevre, Scott, Sieg, Stuart, Chi, Cheng, Meli, Luciana, Parnell, Doni, Schmidt, Kristin, Sanchez, Martha, Singh, Lov

Année:

2017

Langue:

english

Fichier:

PDF, 5.35 MB

english, 2017

35

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, United States (Sunday 26 February 2017)] Advances in Patterning Materials and Processes XXXIV - Electrical study of DSA shrink process and CD rectification effect at sub-60nm using EUV test vehicle

Hohle, Christoph K., Gronheid, Roel, Chi, Cheng, Liu, Chi-Chun, Meli, Luciana, Guo, Jing, Parnell, Doni, Mignot, Yann, Schmidt, Kristin, Sanchez, Martha, Farrell, Richard, Singh, Lovejeet, Furukawa, T

Année:

2017

Langue:

english

Fichier:

PDF, 691 KB

english, 2017